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ТКУ серии SR & ZLF Система контроля температуры нагрева охлаждения реактора

Система контроля температуры TCU использует существующую инфраструктуру тепловой энергии (например, пар, охлаждающая вода и жидкость сверхнизкой температуры - "первичная система") для интеграции в единую систему теплоносителя или вторичный контур, используемый для контроля температуры технологического оборудования. Она может обеспечивать динамический контроль температуры в диапазоне от -120℃ до 300℃.

ETCU Series Heat Exchange Chiller without compressor

Представления

Multi-channel independent temperature control can have independent temperature range, cooling and heating capacity, heat transfer medium flow, etc., using two independent systems, choose steam compression refrigeration according to the required temperature range, or use ETCU compressor-free heat exchange system, the system can use expansion tank, condenser, cooling water system, etc., which can effectively reduce the size of equipment and reduce the operation steps.

FLTZ Variable Frequency  Series Multi-channel Chillers

Semiconductor air cooling & water cooling Chiller is mainly used for precise temperature control in semiconductor production and testing. Products include fluid fluorinated liquid temperature control (minimum -100 degrees), gas hot and cold rapid temperature change, rapid temperature change chuck, low temperature gas refrigerator (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies a variety of algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.

Чиллер серии FLTZ с переменной частотой для полупроводниковой промышленности

Представления

Semiconductor temperature control unit Chiller is mainly used for precise temperature control in the semiconductor production process and testing process. The company applies multiple algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.

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